US 12,078,765 B2
Radiation detection element
Osamu Shimada, Tokyo (JP); Tomohisa Motomura, Tokyo (JP); Toru Tanimori, Kyoto (JP); and Atsushi Takada, Kyoto (JP)
Assigned to DAI NIPPON PRINTING CO., LTD., Tokyo (JP)
Filed by DAI NIPPON PRINTING CO., LTD., Tokyo (JP)
Filed on Apr. 20, 2021, as Appl. No. 17/235,472.
Application 17/235,472 is a continuation of application No. PCT/JP2019/041570, filed on Oct. 23, 2019.
Claims priority of application No. 2018-202037 (JP), filed on Oct. 26, 2018.
Prior Publication US 2021/0239857 A1, Aug. 5, 2021
Int. Cl. G01T 1/185 (2006.01); G01T 1/02 (2006.01); G01T 1/29 (2006.01); H01J 47/02 (2006.01); H01J 47/06 (2006.01)
CPC G01T 1/185 (2013.01) [G01T 1/02 (2013.01); G01T 1/2935 (2013.01); H01J 47/02 (2013.01); H01J 47/06 (2013.01)] 16 Claims
OG exemplary drawing
 
9. A radiation detection element comprising:
a base material having a first surface and a second surface opposite to the first surface;
a first electrode penetrating the base material, electrically connected to the first surface side and the second surface side and exposed on the first surface side;
a second electrode adjacent to the first electrode in a first direction, penetrating the base material, electrically connected to the first surface side and the second surface side and exposed on the first surface side;
a third electrode adjacent to the first electrode in a second direction intersecting with the first direction, penetrating the base material, electrically connected to the first surface side and the second surface side and exposed on the first surface side;
a fourth electrode adjacent to the third electrode in the first direction, adjacent to the second electrode in the second direction, penetrating the base material, electrically connected to the first surface side and the second surface side and exposed on the first surface side;
a fifth electrode provided on the first surface, provided between the first electrode and the second electrode, between the second electrode and the third electrode, between the third electrode and the fourth electrode and between the fourth electrode and the first electrode, and separated from the first electrode, the second electrode, the third electrode and the fourth electrode;
a first external terminal electrically connected to the first electrode on the second surface side;
a second external terminal electrically connected to the second electrode on the second surface side;
a third external terminal electrically connected to the third electrode on the second surface side; and
a fourth external terminal electrically connected to the fourth electrode on the second surface side,
wherein
each of the first external terminal, the second electrode, the third electrode, the fourth electrode, and the fourth external terminal is insulated from each other and connected to a wiring substrate, and
a region provided on the first electrode, the second electrode, the third electrode, the fourth electrode, and the fifth electrode overlaps at least one of the first external terminal, the second external terminal, the third external terminal, and the fourth external terminal in a view vertical to the first surface side of the base material.