CPC G01R 31/2867 (2013.01) [G01R 31/2887 (2013.01); G01R 31/2889 (2013.01)] | 4 Claims |
1. A workpiece positioning mechanism comprising:
a tray on which a workpiece is placed;
a frame in which a notch defining a height position of the tray positioned in an inspection region is formed;
a plurality of pins that are provided on the frame and position the tray; and
a bias applier that positions the tray in the inspection region by biasing a bottom surface,
wherein each of the plurality of pins is composed of:
a body portion that is connected to the frame, has a side circumferential surface having a constant outer diameter, and defines a planar position of the tray by abutting against a periphery of the tray with the side circumferential surface; and
a tapered portion that has a conical surface formed by narrowing an outer diameter from the body portion toward a tip and guides the tray to the inspection region by making the conical surface slide into contact with the periphery of the tray.
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