US 12,078,627 B2
Measurement method and measurement device using gas sensor
Genki Yoshikawa, Ibaraki (JP); Takahiro Nemoto, Ibaraki (JP); Masaaki Matoba, Ibaraki (JP); and Kosuke Minami, Ibaraki (JP)
Assigned to NATIONAL INSTITUTE FOR MATERIALS SCIENCE, Ibaraki (JP)
Appl. No. 17/627,421
Filed by NATIONAL INSTITUTE FOR MATERIALS SCIENCE, Ibaraki (JP)
PCT Filed Jun. 17, 2020, PCT No. PCT/JP2020/023663
§ 371(c)(1), (2) Date Jan. 14, 2022,
PCT Pub. No. WO2021/014835, PCT Pub. Date Jan. 28, 2021.
Claims priority of application No. 2019-137069 (JP), filed on Jul. 25, 2019.
Prior Publication US 2022/0260540 A1, Aug. 18, 2022
Int. Cl. G01N 33/00 (2006.01); G01N 1/38 (2006.01)
CPC G01N 33/0036 (2013.01) [G01N 1/38 (2013.01); G01N 2001/381 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A measurement method using a gas sensor, the measurement being performed while alternately switching between a reference gas and a sample gas to be measured and supplying the reference gas and the sample gas to a sensor element in the gas sensor,
wherein at least one of the reference gas and the sample gas is allowed to contain a specific gas,
the method comprising a step of equilibrating a concentration of the specific gas in the reference gas with a concentration of the specific gas in the sample gas by connecting a flow path of the reference gas and a flow path of the sample gas to each other via a permeable membrane for the specific gas,
wherein a gas flow of the reference gas and a gas flow of the sample gas flowing across the permeable membrane are alternate gas flows by switching between the reference gas and the sample gas.