	US 12,078,610 B2
	Chemical sensor device and chemical sensor module
Yoshiaki Sugizaki, Fujisawa Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Aug. 13, 2021, as Appl. No. 17/402,220.
Claims priority of application No. 2021-031382 (JP), filed on Mar. 1, 2021.
Prior Publication US 2022/0276198 A1, Sep. 1, 2022
Int. Cl. G01N 27/414 (2006.01); B01L 3/00 (2006.01)

CPC G01N 27/4145 (2013.01) [B01L 3/5023 (2013.01); G01N 27/4141 (2013.01); B01L 2300/0636 (2013.01); B01L 2300/0663 (2013.01); B01L 2300/069 (2013.01); B01L 2400/0406 (2013.01)]

7 Claims

1. A chemical sensor device comprising:

a substrate;

a chemical sensor element formed on the substrate and including a sensor surface exposed to mist; and

a first water-absorbing member provided around the sensor surface on the substrate and including an opening that exposes the sensor surface,

the chemical sensor element further including probe molecules fixed to the sensor surface.