US 12,078,604 B2
Monitoring properties of X-ray beam during X-ray analysis
Alexander Krokhmal, Haifa (IL); and Asher Peled, Kfar-Vradim (IL)
Assigned to BRUKER TECHNOLOGIES LTD., Migdal HaEmek (IL)
Filed by BRUKER TECHNOLOGIES LTD., Migdal HaEmek (IL)
Filed on Sep. 5, 2022, as Appl. No. 17/902,926.
Prior Publication US 2024/0077437 A1, Mar. 7, 2024
Int. Cl. G01N 23/223 (2006.01)
CPC G01N 23/223 (2013.01) [G01N 2223/076 (2013.01); G01N 2223/3032 (2013.01); G01N 2223/3037 (2013.01); G01N 2223/306 (2013.01); G01N 2223/321 (2013.01); G01N 2223/6116 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system for X-ray analysis, the system comprising:
an X-ray analysis assembly, which is configured to (i) direct an X-ray beam to impinge on a surface of a sample, and (ii) receive fluorescence radiation excited from the sample in response to the impinged X-ray beam;
a target assembly comprising one or more measurement targets, at least one of the measurement targets being placed in an optical path between the X-ray analysis assembly and the sample, the target assembly being configured to move between (i) one or more first positions in which one or more of the measurement targets are positioned in the X-ray beam, (ii) one or more second positions in which the optical path is unobstructed by the target assembly, and (iii) at least a transition area between one of the first positions and one of the second positions; and
a processor, which is configured to (a) control movement of the target assembly between the first positions and the second positions, for alternately (i) monitoring properties of the X-ray beam using the measurement targets, and (ii) performing the X-ray analysis at a measurement site of the sample, and (b) exclude, from the X-ray analysis and from the monitoring of the properties, the fluorescence radiation excited from the transition area.