US 12,078,589 B2
Optical measuring device
Tomohiro Taniguchi, Musashino (JP); Kazutaka Hara, Musashino (JP); and Atsuko Kawakita, Musashino (JP)
Assigned to Nippon Telegraph and Telephone Corporation, Tokyo (JP)
Appl. No. 17/638,122
Filed by Nippon Telegraph and Telephone Corporation, Tokyo (JP)
PCT Filed Aug. 27, 2019, PCT No. PCT/JP2019/033578
§ 371(c)(1), (2) Date Feb. 24, 2022,
PCT Pub. No. WO2021/038730, PCT Pub. Date Mar. 4, 2021.
Prior Publication US 2022/0291118 A1, Sep. 15, 2022
Int. Cl. G01N 21/21 (2006.01); G01N 21/17 (2006.01)
CPC G01N 21/21 (2013.01) [G01N 2021/1744 (2013.01); G01N 2021/1793 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An optical measurement device comprising:
a light source configured to generate and emit (i) a first irradiation light with a beam shape at a first time, and (ii) a second irradiation light at a second time;
a beam controller, comprising a micro electro mechanical systems mirror, configured to control a first irradiation direction of the first irradiation light, and a second irradiation direction of the second irradiation light;
condensing unit configured to condense (i) a first returned light generated by irradiating a first part of a measurement target with the first irradiation light, and (ii) a second returned light generated by irradicating a second part of the measurement target with the second irradiation light; and
a detector, including one or more processors, configured to:
detect the first returned light and the second returned light condensed by the condensing unit,
match (i) the first irradiation light with the first returned light based on a timing of the first irradiation light and a timing of the first returned light, and match (ii) the second irradiation light with the second returned light based on a timing of the second irradiation light and a timing of the second returned light, and
determine property information regarding (i) the first part of the measurement target based on an amount of the first returned light and (ii) the second part of the measurement target based on an amount of the second returned light.