CPC G01L 5/167 (2013.01) [B25J 13/085 (2013.01); B25J 19/028 (2013.01)] | 20 Claims |
1. A piezoelectric sensor comprising:
an elastic body having a first surface;
a regulatory section which is disposed at a position where the regulatory section faces the first surface of the elastic body, and which is configured to limit a deformation of the elastic body; and
a first piezoelectric element which is partially fixed to the regulatory section, and which deforms in accordance with the deformation of the elastic body, wherein
the first piezoelectric element outputs a voltage signal which increases and decreases from a reference voltage in accordance with a direction of the deformation.
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