US 12,078,545 B2
Microbolometer with filtering function
Nicolas Boudou, Grenoble (FR)
Assigned to LYNRED, Palaiseau (FR)
Appl. No. 17/615,361
Filed by LYNRED, Palaiseau (FR)
PCT Filed Jun. 5, 2020, PCT No. PCT/EP2020/065680
§ 371(c)(1), (2) Date Nov. 30, 2021,
PCT Pub. No. WO2020/245395, PCT Pub. Date Dec. 10, 2020.
Claims priority of application No. 1905965 (FR), filed on Jun. 5, 2019.
Prior Publication US 2022/0228920 A1, Jul. 21, 2022
Int. Cl. G01J 5/20 (2006.01); G01J 5/00 (2022.01)
CPC G01J 5/20 (2013.01) [G01J 2005/0077 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A microbolometer comprising an array of pixels, each pixel comprising one or more detection cells, each detection cell comprising an absorption layer forming a quarter-wave cavity having a height h of between 1.5 and 5 μm, wherein the pitch of the detection cells in at least one axis in a plane of the pixel array is in the range 2.4 h to 3.6 h.