CPC F04D 19/042 (2013.01) [F04D 27/006 (2013.01); F04D 29/582 (2013.01); F04D 29/701 (2013.01)] | 8 Claims |
1. A vacuum pump comprising:
a vacuum pump main body which exhausts a gas in a chamber; and
a control device which controls the vacuum pump main body, wherein:
the control device executes:
a first temperature control for heating a pipe connected to a stage subsequent to the vacuum pump main body by a heater attached on the pipe, and
a second temperature control for cooling a trap device with a refrigerant, the trap device connected to the pipe, wherein the trap device is configured to generate a deposit from the gas exhausted from the chamber to remove the deposit.
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