US 12,077,881 B2
Crystal growth apparatus
Robert Ebner, Leonding (AT); Ghassan Barbar, Gundelfingen (DE); Chih-Yung Hsiung, Leonding (AT); and Bernd Gruhn, Göriach (AT)
Assigned to EBNER Industrieofenbau GmbH, Leonding (AT)
Appl. No. 17/296,217
Filed by EBNER Industrieofenbau GmbH, Leonding (AT)
PCT Filed Nov. 19, 2019, PCT No. PCT/EP2019/081770
§ 371(c)(1), (2) Date May 21, 2021,
PCT Pub. No. WO2020/104444, PCT Pub. Date May 28, 2020.
Claims priority of application No. 10 2018 129 492.1 (DE), filed on Nov. 22, 2018.
Prior Publication US 2022/0010457 A1, Jan. 13, 2022
Int. Cl. C30B 35/00 (2006.01); C30B 7/14 (2006.01); C30B 25/14 (2006.01)
CPC C30B 35/002 (2013.01) [C30B 7/14 (2013.01); C30B 25/14 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An apparatus for growing crystals, the apparatus comprising:
a chamber,
a crucible arranged in a heatable accommodation space of the chamber, the crucible having a horizontally arranged bottom and at least one vertically arranged side wall extending from the bottom to a horizontally arranged top section of the crucible, the bottom, side wall, and top section bounding an inner volume of the crucible which is configured for growing crystals inside, the crucible having a plurality of deposition sections on the side wall, each deposition section including a protrusion extending from the side wall into the inner volume, each protrusion being configured for arranging a seed crystal thereon, wherein each protrusion has an upper surface, an end face and a lower surface, and wherein the deposition sections are spaced apart from each other so that the upper surface of a first one of the protrusions is at a distance below the lower surface of a neighboring second one of the protrusions,
an ejection column element extending partially between the bottom and the top section of the crucible along a central vertical axis of the crucible, and
a plurality of nozzles arranged on the ejection column element and configured for injecting a reaction fluid into the inner volume of the crucible, wherein each nozzle directs reaction fluid toward a respective one of the deposition sections.