US 12,077,856 B2
Reactor for coating particles in stationary chamber with rotating paddles and gas injection
Jonathan Frankel, Los Gatos, CA (US); Colin C. Neikirk, Mountain View, CA (US); Pravin K. Narwankar, Sunnyvale, CA (US); Quoc Truong, San Ramon, CA (US); Govindraj Desai, Karnataka (IN); Sekar Krishnasamy, Bangalore (IN); and Shrikant Swaminathan, Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 9, 2023, as Appl. No. 18/314,707.
Application 18/314,707 is a division of application No. 16/855,871, filed on Apr. 22, 2020, granted, now 11,674,223.
Claims priority of provisional application 62/838,237, filed on Apr. 24, 2019.
Prior Publication US 2023/0279543 A1, Sep. 7, 2023
Int. Cl. C23C 16/44 (2006.01); B01F 27/051 (2022.01); B01F 27/07 (2022.01); B01F 27/072 (2022.01); B01F 27/112 (2022.01); B01F 27/70 (2022.01); B01J 19/00 (2006.01); B01J 19/18 (2006.01); C23C 16/455 (2006.01)
CPC C23C 16/4417 (2013.01) [B01F 27/051 (2022.01); B01F 27/0726 (2022.01); B01F 27/074 (2022.01); B01F 27/112 (2022.01); B01F 27/70 (2022.01); B01J 19/0066 (2013.01); B01J 19/18 (2013.01); C23C 16/45555 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A reactor for coating particles, comprising:
a stationary vacuum chamber to hold a bed of particles to be coated, the stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion;
a vacuum port in the upper portion of the stationary vacuum chamber;
a paddle assembly including a rotatable drive shaft and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by a motor orbits the plurality of paddles about the drive shaft inside the stationary vacuum chamber; and
a first gas injection assembly including
a vaporizer configured to convert a first liquid received from a fluid source into a first reactant or precursor gas,
a manifold including a gas distribution chamber and a first inlet aperture coupling the vaporizer to the gas distribution chamber, wherein the gas distribution chamber has a width along a longitudinal first axis of the drive shaft and a height along a second axis perpendicular to the longitudinal first axis and the first inlet aperture is narrower than the gas distribution chamber along the first axis and the second axis, and
a plurality of channels leading from the manifold to a plurality of apertures located in the lower portion of the stationary vacuum chamber.