US 12,077,842 B2
Mo doped AlCrSiN/Mo self-lubricating films and preparation method thereof
Tiegang Wang, Tianjin (CN); Deqiang Meng, Tianjin (CN); Yanmei Liu, Tianjin (CN); Bing Yan, Tianjin (CN); Renren Xu, Tianjin (CN); and Zhaoxing Yin, Tianjin (CN)
Assigned to TIANJIN UNIVERSITY OF TECHNOLOGY AND EDUCATION (TEACHER DEVELOPMENT CENTER OF CHINA VOCATIONAL TRAINING AND GUIDANCE), Tianjin (CN)
Filed by TIANJIN UNIV. OF TECHNOLOGY AND EDUCATION (TEACHER DEVT. CENTER OF CHINA VOC. TRAINING AND GUIDANCE), Tianjin (CN)
Filed on Mar. 22, 2022, as Appl. No. 17/655,907.
Application 17/655,907 is a continuation in part of application No. PCT/CN2019/125596, filed on Dec. 16, 2019.
Claims priority of application No. 201910897038.6 (CN), filed on Sep. 23, 2019.
Prior Publication US 2022/0213588 A1, Jul. 7, 2022
Int. Cl. C23C 14/06 (2006.01); C23C 14/02 (2006.01); C23C 14/35 (2006.01)
CPC C23C 14/0641 (2013.01) [C23C 14/024 (2013.01); C23C 14/352 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A Mo doped AlCrSiN/Mo self-lubricating film, prepared by doping an AlCrSiN/Mo film with Mo, comprising 14.3-25.5 at. % of Al, 14.3-36.2 at. % of Cr, 1.6-3.4 at. % of Si, 33.6-56.9 at. % of N, and 0.3-6.3 at. % of Mo.