CPC C23C 14/0641 (2013.01) [C23C 14/024 (2013.01); C23C 14/352 (2013.01)] | 11 Claims |
1. A Mo doped AlCrSiN/Mo self-lubricating film, prepared by doping an AlCrSiN/Mo film with Mo, comprising 14.3-25.5 at. % of Al, 14.3-36.2 at. % of Cr, 1.6-3.4 at. % of Si, 33.6-56.9 at. % of N, and 0.3-6.3 at. % of Mo.
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