US 12,077,727 B2
Semiconductor aqueous composition and use of the same
Kazuma Yamamoto, Kakegawa (JP); Maki Ishii, Kakegawa (JP); and Tatsuro Nagahara, Kakegawa (JP)
Assigned to Merck Patent GmbH, Darmstadt (DE)
Appl. No. 17/288,196
Filed by Merck Patent GmbH, Darmstadt (DE)
PCT Filed Oct. 21, 2019, PCT No. PCT/EP2019/078495
§ 371(c)(1), (2) Date Apr. 23, 2021,
PCT Pub. No. WO2020/083809, PCT Pub. Date Apr. 30, 2020.
Claims priority of application No. 2018-199941 (JP), filed on Oct. 24, 2018.
Prior Publication US 2021/0403829 A1, Dec. 30, 2021
Int. Cl. C11D 1/88 (2006.01); G03F 7/40 (2006.01); H01L 21/311 (2006.01); H01L 21/768 (2006.01)
CPC C11D 1/88 (2013.01) [G03F 7/40 (2013.01); H01L 21/31144 (2013.01); H01L 21/768 (2013.01); C11D 2111/22 (2024.01)] 26 Claims
 
1. A semiconductor aqueous composition, comprising:
a single or plurality of surfactant(s) having a monovalent anion part represented by formula (I) and a monovalent cation part other than hydrogen ion; water, and a C3-30 alcohol compound which has 1 to 3 hydroxy groups and may be substituted by F,
Chain 1 - X1—N— —X2- Chain 2 (I)
wherein,
X1 is —C(═O)— or —S(═O)2—,
X2 is —C(═O)— or —S(═O)2—,
Chain 1 is a linear or branched C1-20 alkyl, wherein one or more H in the C1-20 alkyl are replaced by F, and one or more methylenes in Chain 1 may be replaced by —O—, and Chain 2 is a linear or branched C1-20 alkyl, wherein one or more H in the C1-20 alkyl are replaced by F, and one or more methylenes in Chain 2 may be replaced by —O—, with the proviso that Chain 1 and Chain 2 may be bonded to form a ring structure.