US 12,077,686 B2
Temporary adhesive containing epoxy-modified polysiloxane
Kazuhiro Sawada, Toyama (JP); Tetsuya Shinjo, Toyama (JP); Hiroshi Ogino, Toyama (JP); Satoshi Kamibayashi, Toyama (JP); and Shunsuke Moriya, Toyama (JP)
Assigned to NISSAN CHEMICAL CORPORATION, Tokyo (JP)
Appl. No. 16/615,981
Filed by NISSAN CHEMICAL CORPORATION, Tokyo (JP)
PCT Filed May 23, 2018, PCT No. PCT/JP2018/019849
§ 371(c)(1), (2) Date Nov. 22, 2019,
PCT Pub. No. WO2018/216732, PCT Pub. Date Nov. 29, 2018.
Claims priority of application No. 2017-102434 (JP), filed on May 24, 2017.
Prior Publication US 2020/0109325 A1, Apr. 9, 2020
Int. Cl. C09J 183/06 (2006.01); H01L 21/683 (2006.01)
CPC C09J 183/06 (2013.01) [H01L 21/6836 (2013.01); C09J 2203/326 (2013.01); H01L 2221/68318 (2013.01)] 8 Claims
 
1. An adhesive for forming a single adhesive layer to separatably attach a support to a circuit side of a wafer and process a rear surface of the wafer, the adhesive containing a mixture of a component (A) to be cured by a hydrosilylation reaction, and a component (B) containing an epoxy-modified polyorganosiloxane at a ratio in % by mass of the component (A) to the component (B) of 99.995:0.005 to 30:70,
wherein the component (A) contains a polysiloxane (A1) and a platinum group metal-based catalyst (A2),
wherein the polysiloxane (A1) contains:
a polyorganosiloxane (a1) selected from the group consisting of a siloxane unit (Q′ unit) of SiO2, a siloxane unit (M′ unit) of R1′R2′R3′SiO1/2, a siloxane unit (D′ unit) of R4′R5′SiO2/2, a siloxane unit (T′ unit) of R6′SiO3/2, and a combination thereof, and R1′ to R6′ are each independently a monovalent chemical group that is a C1-10 alkyl group or a C2-10 alkenyl group; and
a polyorganosiloxane (a2) selected from the group consisting of a siloxane unit (Q″ unit) of SiO2, a siloxane unit (M″ unit) of R1″R2″R3″SiO1/2, a siloxane unit (D″ unit) of R4″R5″SiO2/2, a siloxane unit (T″ unit) of R6″SiO3/2, and a combination thereof, and R1″ to R6″ are each independently a C1-10 alkyl group or a hydrogen atom, and
wherein the epoxy-modified polyorganosiloxane of component (B) contains a siloxane unit (D′″ unit) of RI′″R2′″SiO2/2, wherein R1′″ is a C1-10 alkyl group, and R2′″ is a C1-10 alkyl group or an epoxy group, provided that R1′″ and R2′″ are each bonded to a silicon atom through a Si-C bond, and the epoxy-modified polyorganosiloxane of component (B) may optionally further contain one or more units selected from the group consisting of a siloxane unit (Q unit) of SiO2, a siloxane unit (M unit) of R1R2R3SiO1/2, and a siloxane unit (T unit) of R6SiO3/2, wherein R1, R2, R3, and R6 are each independently a monovalent chemical group that is a C1-10 alkyl group, a C2-10 alkenyl group, or a hydrogen atom.