US 12,077,441 B2
Process for manufacturing a silicon carbide coated body
Peter J. Guercio, Queen Creek, AZ (US); Paul Westphal, Scottsdale, AZ (US); and Kirk Allen Fisher, Tempe, AZ (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Appl. No. 16/957,682
Filed by Applied Materials, Inc., Santa Clara, CA (US)
PCT Filed Dec. 22, 2018, PCT No. PCT/US2018/067418
§ 371(c)(1), (2) Date Jun. 24, 2020,
PCT Pub. No. WO2019/133559, PCT Pub. Date Jul. 4, 2019.
Claims priority of provisional application 62/610,695, filed on Dec. 27, 2017.
Claims priority of application No. 18152230 (EP), filed on Jan. 18, 2018.
Prior Publication US 2021/0062336 A1, Mar. 4, 2021
Int. Cl. C01B 32/318 (2017.01); C01B 32/336 (2017.01); C01B 32/372 (2017.01); C23C 16/02 (2006.01); C23C 16/32 (2006.01); C23C 16/44 (2006.01)
CPC C01B 32/318 (2017.08) [C01B 32/336 (2017.08); C01B 32/372 (2017.08); C23C 16/0227 (2013.01); C23C 16/325 (2013.01); C23C 16/4408 (2013.01); C01P 2002/60 (2013.01); C01P 2002/72 (2013.01); C01P 2004/03 (2013.01); C01P 2006/10 (2013.01); C01P 2006/16 (2013.01); C01P 2006/80 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An activated graphite substrate having an initial open porosity comprising pores with an average pore diameter in a range of 0.4-5.0 μm and comprising pores with a surface pore diameter of <10 μm, and a subsequently modified surface porosity comprising pores with an average pore diameter of >10 μm at a surface of the activated graphite substrate, and the activated graphite substrate having an average grain size of <0.05 mm.