| CPC B41J 2/14233 (2013.01) | 11 Claims |
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1. A piezoelectric actuator comprising:
a piezoelectric element substrate comprising:
a diaphragm;
multiple piezoelectric elements each comprising:
a first electrode on the diaphragm;
a piezoelectric layer on the first electrode; and
a second electrode on the piezoelectric layer;
a metal wiring layer on the second electrode, the metal wiring layer including wiring patterns coupled to the multiple piezoelectric elements; and
a subframe bonded to a bonding region of the piezoelectric element substrate around a periphery of a first wiring region where the multiple piezoelectric elements are disposed via adhesive,
wherein the subframe has housing recesses respectively housing the multiple piezoelectric elements and a wiring recess different from the housing recesses, the wiring recess facing the wiring patterns in the bonding region around the periphery of the first wiring region where the multiple piezoelectric elements are disposed and not housing any of the multiple piezoelectric elements.
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