| CPC B29C 59/026 (2013.01) [B29C 59/002 (2013.01); G03F 7/0002 (2013.01); B29C 2037/90 (2013.01)] | 7 Claims |
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1. A forming apparatus for forming a formable material using a mold including a contact region to be brought into contact with the formable material on a substrate, the apparatus comprising:
a mold holder configured to hold the mold;
a substrate holder configured to hold the substrate onto which the formable material has been supplied;
a measuring device configured to measure a height position of the contact region of the mold; and
a controller configured to perform processing of bringing the contact region and the formable material on the substrate into contact with each other, wherein the controller controls:
the processing so as to bring the mold holder and the substrate holder closer to each other at a first relative speed and then bring the mold holder and the substrate holder even closer to each other at a second relative speed lower than the first relative speed; and
switching from the first relative speed to the second relative speed, so as to compensate a manufacturing error of the mold, based on a difference between a first measured height position, which is measured by the measuring device, of the contact region of the mold and a second measured height position, which is measured by the measuring device, of a contact region of a reference mold whose manufacturing error is known.
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