US 12,076,877 B2
Polishing platens and polishing platen manufacturing methods
Bum Jick Kim, Irvine, CA (US); Danielle Loi, San Jose, CA (US); Jay Gurusamy, Santa Clara, CA (US); and Steven M. Zuniga, Soquel, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 27, 2020, as Appl. No. 16/884,888.
Claims priority of provisional application 62/855,894, filed on May 31, 2019.
Prior Publication US 2020/0376700 A1, Dec. 3, 2020
Int. Cl. B26D 3/00 (2006.01); B23B 1/00 (2006.01); B24B 37/10 (2012.01); B24B 37/11 (2012.01); B24B 37/30 (2012.01); B24B 41/04 (2006.01); B24D 3/00 (2006.01); B26D 1/02 (2006.01)
CPC B26D 3/006 (2013.01) [B23B 1/00 (2013.01); B24B 37/10 (2013.01); B24B 37/11 (2013.01); B24B 37/30 (2013.01); B24B 41/04 (2013.01); B24D 3/00 (2013.01); B26D 1/02 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A polishing platen, comprising:
a cylindrical metal body with an upper platen surface and a center around which the cylindrical metal body is configured to rotate, the upper platen surface having a radially symmetric convex shape about the center; and
a polymer coating layer disposed upon the upper platen surface of the cylindrical metal body and having had a portion of the polymer coating layer removed to form a polymer pad-mounting surface having a first surface height at a first radius and a second surface height at a second radius, wherein:
the first surface height is greater than the second surface height,
the polymer coating layer comprises a fluoropolymer,
both the first radius and the second radius are disposed outward of the center and the second radius is disposed radially outward of the first radius,
the first and second surface heights are measured as distances from a reference plane that is parallel to the pad-mounting surface at the first radius, and
a difference between the first and second surface heights is about 25 μm or more.