US 12,076,859 B2
Infinite rotation of vacuum robot linkage through timing belt with isolated environment
Karuppasamy Muthukamatchi, Madurai (IN); and Akash Goyal, Karnataka (IN)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Oct. 14, 2020, as Appl. No. 17/070,362.
Prior Publication US 2022/0111513 A1, Apr. 14, 2022
Int. Cl. B25J 9/10 (2006.01); B25J 9/04 (2006.01); B25J 15/04 (2006.01); B25J 15/06 (2006.01); B25J 19/00 (2006.01)
CPC B25J 9/1045 (2013.01) [B25J 9/04 (2013.01); B25J 15/0441 (2013.01); B25J 15/0616 (2013.01); B25J 19/0075 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A first vacuum robot linkage comprising:
a body having an input side and an output side, wherein the input side receives through an input opening a plurality of power input shafts, and wherein the output side receives through an output opening a plurality of power output shafts; and
a drive assembly for rotating a second vacuum robot linkage about an output axis, the drive assembly comprising:
a plurality of driving members configured to interact with the plurality of power input shafts;
at least one input seal comprising a first fixed vacuum barrier positioned in the input opening between the plurality of driving members and the plurality of power input shafts, and configured to at least partially isolate an internal environment of the first vacuum robot linkage from an outside environment, wherein the plurality of driving members are supported by a first plurality of bearings that substantially surround the at least one input seal;
a plurality of driven members configured to interact with the plurality of power output shafts, wherein at least one of the plurality of power output shafts is attached to the second vacuum robot linkage;
at least one output seal comprising a second fixed vacuum barrier positioned in the output opening between the plurality of driven members and the plurality of power output shafts, and configured to at least partially isolate the internal environment of the first vacuum robot linkage from the outside environment, wherein the plurality of driven members are supported by a second plurality of bearings that substantially surround the at least one output seal; and
a plurality of transmission elements configured to transmit power from the plurality of driving members to the plurality of driven members.