| CPC B24B 55/06 (2013.01) [B01D 46/0027 (2013.01); B01D 46/58 (2022.01); B01D 53/265 (2013.01); B01D 2279/35 (2013.01)] | 10 Claims |
|
1. An air circulation system used to improve a degree of contamination in a final polishing apparatus comprising a housing formed to accommodate a load unit, an unload unit, and a plurality of polishing units, the air circulation system comprising:
air purification units mounted at positions corresponding to positions of the load unit, the unload unit, and the plurality of polishing units the air purification units being configured to discharge contaminated air in the housing to an outside of the housing, to purify the contaminated air, and to supply purified air again into the housing,
wherein each of the air purification units discharges and supplies air through a duct extending from a lower portion of a side surface of the housing to an upper portion of the housing, and comprises:
an air exhaust configured to discharge the air in the housing to the outside of the housing;
a dehumidifier disposed at a front side of the air exhaust, the dehumidifier being configured to remove moisture contained in the air discharged from the housing;
a temperature adjuster configured to adjust a temperature of the air dehumidified by the dehumidifier to a set temperature;
a filter system configured to remove polishing dust from the air, the temperature of the air having been adjusted to the set temperature by the temperature adjuster; and
an air supply configured to supply the air filtered by the filter system into the housing.
|