US 12,076,760 B2
Pre-wet module, deaerated liquid circulation system, and pre-wet method
Masaya Seki, Tokyo (JP); Mitsutoshi Yahagi, Tokyo (JP); and Nobuya Yamada, Tokyo (JP)
Assigned to EBARA CORPORATION, Tokyo (JP)
Filed by EBARA CORPORATION, Tokyo (JP)
Filed on Oct. 25, 2023, as Appl. No. 18/494,501.
Application 18/494,501 is a division of application No. 17/839,070, filed on Jun. 13, 2022, granted, now 11,833,551.
Application 17/839,070 is a continuation in part of application No. PCT/JP2021/020612, filed on May 31, 2021.
Claims priority of application No. 2021-154525 (JP), filed on Sep. 22, 2021.
Prior Publication US 2024/0050992 A1, Feb. 15, 2024
Int. Cl. B08B 3/02 (2006.01); C23C 18/16 (2006.01); C23C 18/18 (2006.01); H01L 21/687 (2006.01)
CPC B08B 3/022 (2013.01) [C23C 18/163 (2013.01); C23C 18/18 (2013.01); H01L 21/68764 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A pre-wet method comprising:
a first deaeration step of performing a deaeration process by positioning a first substrate at a first position and immersing a surface to be processed of the first substrate downwardly in the deaerated liquid;
a first cleaning step of supplying a cleaning liquid to a surface to be processed of a second substrate in a state where the second substrate is positioned at a second position and the surface to be processed of the second substrate faces upward concurrently with performing of the first deaeration step;
a rotation step of rotating the first substrate and the second substrate to position the second substrate at the first position after the first deaeration step and the first cleaning step;
a second deaeration step of performing a deaeration process by immersing the surface to be processed of the second substrate downwardly in the deaerated liquid after the rotation step; and
a second cleaning step of supplying a cleaning liquid to a surface to be processed of a third substrate in a state where the surface to be processed of the third substrate faces upward at the second position concurrently with performing of the second deaeration step.