CPC B08B 3/022 (2013.01) [C23C 18/163 (2013.01); C23C 18/18 (2013.01); H01L 21/68764 (2013.01)] | 4 Claims |
1. A pre-wet method comprising:
a first deaeration step of performing a deaeration process by positioning a first substrate at a first position and immersing a surface to be processed of the first substrate downwardly in the deaerated liquid;
a first cleaning step of supplying a cleaning liquid to a surface to be processed of a second substrate in a state where the second substrate is positioned at a second position and the surface to be processed of the second substrate faces upward concurrently with performing of the first deaeration step;
a rotation step of rotating the first substrate and the second substrate to position the second substrate at the first position after the first deaeration step and the first cleaning step;
a second deaeration step of performing a deaeration process by immersing the surface to be processed of the second substrate downwardly in the deaerated liquid after the rotation step; and
a second cleaning step of supplying a cleaning liquid to a surface to be processed of a third substrate in a state where the surface to be processed of the third substrate faces upward at the second position concurrently with performing of the second deaeration step.
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