US 12,076,692 B1
Flexible fuel system for combustion abatement
Justin M. Weinstein, Clifton Park, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on Dec. 8, 2023, as Appl. No. 18/533,316.
Int. Cl. B01D 53/90 (2006.01); B01D 53/86 (2006.01)
CPC B01D 53/90 (2013.01) [B01D 53/8696 (2013.01); B01D 2251/102 (2013.01); B01D 2251/11 (2013.01); B01D 2257/2025 (2013.01); B01D 2257/2027 (2013.01); B01D 2257/2042 (2013.01); B01D 2257/2045 (2013.01); B01D 2257/2047 (2013.01); B01D 2257/406 (2013.01); B01D 2257/553 (2013.01); B01D 2257/556 (2013.01); B01D 2258/0216 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A system comprising:
an abatement apparatus including a combustion chamber configured to abate an emission output from a first semiconductor process; and
a flexible fuel assembly coupled to the abatement apparatus and configured to transmit fuel through the combustion chamber which catalyzes a combustion reaction to abate the emission therein, wherein the flexible fuel assembly comprises:
a first fuel source having a first fuel contained therein,
a first mass flow controller (MFC) fluidly coupled between the first fuel source and the abatement apparatus,
a second fuel source having a second fuel contained therein,
a second MFC fluidly coupled between the second fuel source and the abatement apparatus, wherein the flexible fuel assembly is configured to transmit at least one of the first fuel and the second fuel through the abatement apparatus, and
an oxidant assembly fluidly coupled to the abatement apparatus and configured to transmit an oxidant through the combustion chamber, wherein the oxidant catalyzes the combustion reaction with at least one of the first fuel and the second fuel in the combustion chamber.