US 12,076,677 B2
Method for collecting dust from single crystal growth system
Masami Nakanishi, Hsinchu (TW); Yu-Sheng Su, Hsinchu (TW); and I-Ching Li, Hsinchu (TW)
Assigned to GLOBALWAFERS CO., LTD., Hsinchu (TW)
Filed by GlobalWafers Co., Ltd., Hsinchu (TW)
Filed on Jul. 3, 2023, as Appl. No. 18/217,687.
Application 18/217,687 is a division of application No. 16/907,313, filed on Jun. 22, 2020, granted, now 11,845,030.
Prior Publication US 2023/0347271 A1, Nov. 2, 2023
Int. Cl. B01D 45/16 (2006.01); B01D 53/14 (2006.01); B01D 53/46 (2006.01); B01D 53/76 (2006.01); B04C 5/185 (2006.01); B04C 9/00 (2006.01); C30B 35/00 (2006.01)
CPC B01D 45/16 (2013.01) [B01D 53/145 (2013.01); B01D 53/46 (2013.01); B01D 53/76 (2013.01); B04C 5/185 (2013.01); B04C 9/00 (2013.01); C30B 35/00 (2013.01); B01D 2252/103 (2013.01); B04C 2009/005 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A method for collecting dust from a single crystal growth system, comprising steps as follows:
providing dry air and oxygen into an exit pipe connecting to the single crystal growth system, the oxygen reacting with unstable dust for forming dust oxide so as to stabilize the dust in the exit pipe, wherein the exit pipe is used to exhaust the unstable dust from the single crystal growth system;
blowing a first inert gas into the exit pipe to compel the dust oxide toward a dust collecting device;
collecting the dust oxide by the dust collecting device; and
providing a rotary pump to transport residues of the dust oxide from an outlet of the dust collecting device to an inlet of the rotary pump.