| CPC H10K 59/1213 (2023.02) [H10D 30/6755 (2025.01); H10D 30/6757 (2025.01); H10K 50/844 (2023.02); H10K 59/1216 (2023.02); H10K 59/873 (2023.02)] | 10 Claims |

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1. A thin-film transistor substrate comprising:
a substrate;
a semiconductor layer on the substrate, wherein the semiconductor layer comprises a first conductive region, a second conductive region, and a first channel region between the first conductive region and the second conductive region;
a gate insulating layer on the semiconductor layer, wherein the gate insulating layer comprises a first charge implanted region which overlaps a portion of the first channel region and into which charged ions are implanted; and
a first gate electrode on the gate insulating layer to overlap the first channel region,
wherein a distance between a center of the first charge implanted region and one of the first conductive region and the second conductive region is less than a distance between a center of the first channel region and the one of the first conductive region and the second conductive region when viewed in a thickness direction of the substrate.
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