US 12,408,503 B2
Layered structure with deformation control layer
Andrew Johnson, Cardiff (GB); and Andrew Joel, Cardiff (GB)
Assigned to IQE plc, Cardiff (GB)
Filed by IQE plc, Cardiff (GB)
Filed on Nov. 1, 2022, as Appl. No. 17/978,519.
Claims priority of application No. 2115721 (GB), filed on Nov. 2, 2021.
Prior Publication US 2023/0132522 A1, May 4, 2023
Int. Cl. H10H 20/80 (2025.01); H01S 5/06 (2006.01); H01S 5/183 (2006.01); H01S 5/20 (2006.01); H10H 20/815 (2025.01)
CPC H10H 20/862 (2025.01) [H01S 5/0607 (2013.01); H01S 5/18366 (2013.01); H01S 5/2027 (2013.01); H10H 20/815 (2025.01)] 20 Claims
OG exemplary drawing
 
1. A layered structure comprising:
a substrate having a first deformation, wherein the substrate comprises germanium;
one or more device layers forming an entire device, the entire device having a second deformation; and
a deformation control layer which is pseudomorphic with respect to the substrate, the deformation control layer having a third deformation,
wherein the deformation control layer is selected such that a sum of the first deformation, the second deformation, and the third deformation matches a target level of deformation,
wherein the target level of deformation comprises a net compressive deformation or a net tensile deformation,
wherein the deformation control layer is positioned between the substrate and the entire device, and
wherein the entire device is directly on an upper surface of the deformation control layer.