| CPC H10H 20/01335 (2025.01) [H10H 20/819 (2025.01); H10H 20/825 (2025.01)] | 21 Claims |

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1. A light emitting diode device comprising:
a nucleation layer on a substrate, the nucleation layer comprising a III-nitride material;
a patterned dielectric layer on a top surface of the nucleation layer, the patterned dielectric layer comprising a plurality of features and having a plurality of spaces between the plurality of features, wherein the plurality of features have a top surface and sidewalls, and wherein the plurality of spaces provide one or more exposed portions of the top surface of the nucleation layer;
a first III-nitride layer disposed within the plurality of spaces, the first III-nitride layer comprising a first III-nitride material, wherein the first III-nitride layer is on a bottom portion of the sidewalls of the plurality of features and on the one or more exposed portions of the top surface of the nucleation layer within the plurality of spaces, and wherein the first III-nitride layer is not on an upper portion of the sidewalls of the plurality of features;
a second III-nitride layer on the first III-nitride layer, the second III-nitride layer comprises a second III-nitride material;
a plurality of voids disposed between the upper portion of the sidewalls of the plurality of features having no first III-nitride layer thereon, the first III-nitride layer, and the second III-nitride layer;
an anode layer on the second III-nitride layer; and
a cathode layer in a cathode via.
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