US 12,408,463 B2
Trench balance structure pattern in red photodiodes of a pixel array with quad bayer color filter
Chao Niu, Santa Clara, CA (US); Yuanwei Zheng, San Jose, CA (US); and Zhiqiang Lin, Fremont, CA (US)
Assigned to OMNIVISION TECHNOLOGIES, INC., Santa Clara, CA (US)
Filed by OMNIVISION TECHNOLOGIES, INC., Santa Clara, CA (US)
Filed on Mar. 8, 2023, as Appl. No. 18/180,731.
Prior Publication US 2024/0304642 A1, Sep. 12, 2024
Int. Cl. H10F 39/00 (2025.01); H04N 25/78 (2023.01); H10F 39/18 (2025.01)
CPC H10F 39/807 (2025.01) [H04N 25/78 (2023.01); H10F 39/1825 (2025.01); H10F 39/8053 (2025.01); H10F 39/8063 (2025.01); H10F 39/182 (2025.01)] 30 Claims
OG exemplary drawing
 
1. A pixel array, comprising:
a plurality of 2×2 groupings of photodiodes in a semiconductor layer to generate image charge in response to incident light directed through a back side of the semiconductor layer;
a Quad Bayer color filter array (CFA) disposed over the back side of the semiconductor layer over the plurality of 2×2 groupings of photodiodes, wherein the Quad Bayer CFA includes a plurality of color filters, wherein the plurality of color filters includes red color filters, green color filters, and blue color filters, wherein each color filter of the Quad Bayer CFA is disposed over a respective one of the plurality of 2×2 groupings of photodiodes; and
a plurality of trench balance structures disposed in the semiconductor layer, wherein each one of the plurality of trench balance structures is disposed in the semiconductor layer between one of the photodiodes and a respective one of the red color filters of the Quad Bayer CFA, wherein none of the plurality of trench balance structures are disposed between any of the photodiodes and respective green color filters or blue color filters of the Quad Bayer CFA.