US 12,408,388 B2
Ferroelectric transistors and assemblies comprising ferroelectric transistors
Kamal M. Karda, Boise, ID (US); Haitao Liu, Boise, ID (US); and Durai Vishak Nirmal Ramaswamy, Boise, ID (US)
Assigned to Micron Technology, Inc., Boise, ID (US)
Filed by Micron Technology, Inc., Boise, ID (US)
Filed on Jun. 9, 2023, as Appl. No. 18/207,905.
Application 18/207,905 is a division of application No. 16/983,841, filed on Aug. 3, 2020, granted, now 11,715,797.
Claims priority of provisional application 62/892,117, filed on Aug. 27, 2019.
Prior Publication US 2023/0327019 A1, Oct. 12, 2023
Int. Cl. H10D 30/69 (2025.01); H10D 30/01 (2025.01); H10D 30/62 (2025.01); H10D 64/68 (2025.01)
CPC H10D 30/701 (2025.01) [H10D 30/014 (2025.01); H10D 30/015 (2025.01); H10D 30/021 (2025.01); H10D 30/0415 (2025.01); H10D 30/62 (2025.01); H10D 64/689 (2025.01)] 12 Claims
OG exemplary drawing
 
1. An integrated assembly, comprising:
a ferroelectric transistor; the ferroelectric transistor comprising an active region which extends vertically between a first electrode and a second electrode; the active region comprising a first source/drain region proximate the first electrode, a second source/drain region proximate the second electrode, and a body region between the first and second source/drain regions; the ferroelectric transistor including a conductive gate proximate a segment of the body region, said segment being a gated channel region; the active region including a first semiconductor composition extending from a surface of the first electrode, across the first source/drain region and across the gated channel region; the active region including a second semiconductor composition extending from the first semiconductor composition to a surface of the second electrode; the first semiconductor composition comprising a semiconductor oxide, and the second semiconductor composition being compositionally different than the first semiconductor composition;
a first comparative digit line coupled with the first source/drain region; and
a second comparative digit line coupled with the second source/drain region.