US 12,408,355 B2
Metal-insulator-metal capacitor
Jihyung Kim, Suwon-si (KR); Jeonghoon Ahn, Suwon-si (KR); Jaehee Oh, Suwon-si (KR); Shaofeng Ding, Suwon-si (KR); Wonji Park, Suwon-si (KR); and Jegwan Hwang, Suwon-si (KR)
Assigned to Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Mar. 13, 2024, as Appl. No. 18/603,529.
Application 18/603,529 is a division of application No. 17/559,176, filed on Dec. 22, 2021, granted, now 11,955,509.
Claims priority of application No. 10-2021-0066797 (KR), filed on May 25, 2021.
Prior Publication US 2024/0222421 A1, Jul. 4, 2024
Int. Cl. H01L 23/522 (2006.01); H10D 1/00 (2025.01); H10D 1/68 (2025.01)
CPC H10D 1/694 (2025.01) [H01L 23/5223 (2013.01); H10D 1/042 (2025.01); H10D 1/714 (2025.01)] 15 Claims
OG exemplary drawing
 
1. A metal-insulator-metal capacitor, comprising:
a first electrode in contact with an upper surface of a substrate and disposed in a first region of the upper surface;
a second electrode covering the first electrode and extending to a second region, the second region surrounding an outer periphery of the first region;
a third electrode covering the second electrode and extending to a third region, the third region surrounding an outer periphery of the second region;
a first dielectric layer disposed between the first electrode and the second electrode to cover an upper surface and a side surface of the first electrode and extending to the second region of the upper surface of the substrate; and
a second dielectric layer disposed between the second electrode and the third electrode to cover an upper surface and a side surface of the second electrode and extending to the third region of the upper surface of the substrate and in contact with the first dielectric layer;
wherein the first dielectric layer contacts an upper surface of the substrate and extends parallel to the upper surface of the substrate in the third region,
wherein the second dielectric layer contacts an upper surface of the first dielectric layer and extends parallel to an upper surface of the first dielectric layer in the third region, and
wherein the third electrode contacts an upper surface of the second dielectric layer in the third region.
 
10. A metal-insulator-metal capacitor, comprising:
a first electrode disposed on an upper surface of a substrate and disposed in a first region of the upper surface;
a second electrode covering an upper surface and a side surface of the first electrode and extending to a second region, the second region surrounding the first region;
a third electrode covering a side surface and an upper surface of the second electrode and extending to a third region, the third region surrounding the second region;
a first dielectric layer interposed between the first electrode and the second electrode; and
a second dielectric layer interposed between the second electrode and the third electrode,
wherein the first dielectric layer contacts an upper surface of the substrate and extends parallel to the upper surface of the substrate in the third region,
wherein the second dielectric layer contacts an upper surface of the first dielectric layer and extends parallel to an upper surface of the first dielectric layer in the third region,
wherein the third electrode contacts an upper surface of the second dielectric layer in the third region, and
wherein an interior angle between the upper surface and the side surface of each of the first electrode, the second electrode and the third electrode is in a range of 90° to 135°.