US 12,408,348 B2
Semiconductor device and manufacturing method thereof
Byung Woo Kang, Icheon-si (KR)
Assigned to SK hynix Inc., Icheon-si (KR)
Filed by SK hynix Inc., Icheon-si (KR)
Filed on Jun. 10, 2022, as Appl. No. 17/837,788.
Claims priority of application No. 10-2022-0000606 (KR), filed on Jan. 3, 2022.
Prior Publication US 2023/0217662 A1, Jul. 6, 2023
Int. Cl. H10B 53/20 (2023.01)
CPC H10B 53/20 (2023.02) 19 Claims
OG exemplary drawing
 
1. A semiconductor device, comprising:
a first source layer spaced apart from a substrate and disposed in a memory cell region over the substrate;
a second source layer spaced apart from the substrate and disposed in a contact region over the substrate;
a cell stacked structure including interlayer insulating layers and conductive patterns alternately stacked on each other over the first source layer;
a discharge contact passing through at least a part of the second source layer; and
a dielectric layer disposed between the second source layer and the discharge contact,
wherein the second source layer is a first electrode of a capacitor and the discharge contact is a second electrode of the capacitor.