US 12,408,257 B2
Device and method for generating a plasma jet
Yuliia Onyshchenko, Zwijnaarde (BE); Mehrnoush Narimisa, Heusden (BE); Nathalie De Geyter, Langemark (BE); and Rino Morent, Langemark (BE)
Assigned to UNIVERSITEIT GENT, Ghent (BE)
Appl. No. 18/553,715
Filed by UNIVERSITEIT GENT, Ghent (BE)
PCT Filed Mar. 28, 2022, PCT No. PCT/EP2022/058144
§ 371(c)(1), (2) Date Oct. 2, 2023,
PCT Pub. No. WO2022/207563, PCT Pub. Date Oct. 6, 2022.
Claims priority of application No. 21166684 (EP), filed on Apr. 1, 2021.
Prior Publication US 2024/0188208 A1, Jun. 6, 2024
Int. Cl. H05H 1/46 (2006.01); H01J 37/32 (2006.01); B05D 1/00 (2006.01)
CPC H05H 1/466 (2021.05) [H01J 37/32091 (2013.01); H01J 37/3244 (2013.01); B05D 1/62 (2013.01); H01J 2237/3382 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A device for generating a plasma jet, wherein a nozzle of the device comprises:
an inner channel, wherein the device is configured for flowing a first ignitable gas through the inner channel towards an exit opening of the inner channel, wherein a high voltage electrode is arranged in the inner channel for generating a plasma from the first ignitable gas flowing in the inner channel;
a middle channel, wherein the middle channel surrounds the inner channel, wherein the middle channel is electrically insulated from the inner channel, wherein the device is configured for flowing a monomer precursor through the middle channel towards an exit opening of the middle channel;
an outer channel, wherein the outer channel surrounds the middle channel, wherein the outer channel is electrically insulated from the middle channel, wherein the device is configured for flowing a second ignitable gas through the outer channel towards an exit opening of the outer channel; and
a nozzle cap, wherein the nozzle cap encloses a mixing volume located after the exit openings of the inner channel, the middle channel and the outer channel, and wherein the nozzle cap is provided with an exit opening after the mixing volume, wherein the exit opening of the nozzle cap is smaller than the exit opening of the outer channel.