US 12,408,239 B2
PBN heaters for ALD temperature uniformity
Kenneth Brian Doering, San Jose, CA (US); Gregory J. Wilson, Kalispell, MT (US); Karthik Ramanathan, Bangalore (IN); Mario D. Silvetti, Morgan Hill, CA (US); and Kevin Griffin, Livermore, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Appl. No. 16/971,409
Filed by Applied Materials, Inc., Santa Clara, CA (US)
PCT Filed Feb. 20, 2019, PCT No. PCT/US2019/018668
§ 371(c)(1), (2) Date Aug. 20, 2020,
PCT Pub. No. WO2019/164865, PCT Pub. Date Aug. 29, 2019.
Claims priority of provisional application 62/632,748, filed on Feb. 20, 2018.
Prior Publication US 2021/0092800 A1, Mar. 25, 2021
Int. Cl. H05B 3/14 (2006.01); C23C 16/455 (2006.01); H05B 3/00 (2006.01); H05B 3/03 (2006.01)
CPC H05B 3/143 (2013.01) [C23C 16/45544 (2013.01); H05B 3/0019 (2013.01); H05B 3/03 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A heater comprising:
a body comprising pyrolytic boron nitride (PBN), the body having a top and a bottom, the body having a first end and a second end connected by an arc-shaped inner end and an arc-shaped outer end, the bottom of the body having a first recess and a second recess, each of the first recess and the second recess having a raised portion therein, the raised portion in each of the first recess and the second recess extending toward the bottom of the body;
a first heater electrode connected to the bottom of the body, the first heater electrode within the first recess;
a second heater electrode connected to the bottom of the body, the second heater electrode within the second recess; and
a first standoff positioned within the first recess and enclosing the first heater electrode, and a second standoff positioned within the second recess and enclosing the second heater electrode, the first standoff and the second standoff comprising an electrically insulating material.