US 12,407,325 B2
Aluminum nitride dopant scheme for bulk acoustic wave filters
Michael David Hill, Emmitsburg, MD (US)
Assigned to SKYWORKS SOLUTIONS, INC., Irvine, CA (US)
Filed by SKYWORKS SOLUTIONS, INC., Irvine, CA (US)
Filed on Mar. 3, 2022, as Appl. No. 17/685,720.
Claims priority of provisional application 63/156,457, filed on Mar. 4, 2021.
Prior Publication US 2022/0286108 A1, Sep. 8, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/17 (2006.01); H03H 3/02 (2006.01); H03H 9/13 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/176 (2013.01) [H03H 3/02 (2013.01); H03H 9/13 (2013.01); H03H 9/17 (2013.01); H03H 9/562 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An acoustic wave resonator comprising a piezoelectric material formed of aluminum nitride (AlN) doped with one or more dopants to enhance performance of the acoustic wave resonator, the piezoelectric material having a chemical formula of one of
Al1-2xZnxSixN;
Al1-3xLixSi2xN; or
Ca15Si18Al2O12N28.