US 12,407,324 B2
Acoustic wave device
Akira Noguchi, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Mar. 17, 2023, as Appl. No. 18/122,744.
Application 18/122,744 is a continuation of application No. PCT/JP2021/034802, filed on Sep. 22, 2021.
Claims priority of application No. 2020-163568 (JP), filed on Sep. 29, 2020.
Prior Publication US 2023/0223921 A1, Jul. 13, 2023
Int. Cl. H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/54 (2006.01)
CPC H03H 9/133 (2013.01) [H03H 9/17 (2013.01); H03H 9/54 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An acoustic wave device comprising:
a piezoelectric substrate;
an interdigital transducer electrode on the piezoelectric substrate; and
a first reflector and a second reflector on the piezoelectric substrate and on both sides of the interdigital transducer electrode in an acoustic wave propagation direction; wherein
the interdigital transducer electrode, the first reflector, and the second reflector each include a plurality of electrode fingers;
at least one of the interdigital transducer electrode, the first reflector, and the second reflector has a nonuniform duty ratio area where three successive electrode fingers in the acoustic wave propagation direction all have different duty ratios; and
a standard deviation in a distribution of all duty ratios in the interdigital transducer electrode, the first reflector, and the second reflector is greater than or equal to about 0.015.