US 12,407,322 B2
Acoustically decoupled MEMS devices
Farrokh Ayazi, Atlanta, GA (US); Benoit Hamelin, Atlanta, GA (US); and Jeremy Yang, Atlanta, GA (US)
Assigned to GEORGIA TECH RESEARCH CORPORATION, Atlanta, GA (US)
Filed by Georgia Tech Research Corporation, Atlanta, GA (US)
Filed on Aug. 17, 2023, as Appl. No. 18/451,675.
Application 18/451,675 is a continuation of application No. 16/977,827, granted, now 11,777,468, previously published as PCT/US2019/020752, filed on Mar. 5, 2019.
Claims priority of provisional application 62/638,494, filed on Mar. 5, 2018.
Prior Publication US 2024/0030887 A1, Jan. 25, 2024
Int. Cl. H03H 9/02 (2006.01); G01C 19/5698 (2012.01); H02N 1/00 (2006.01); H03H 9/24 (2006.01)
CPC H03H 9/02433 (2013.01) [G01C 19/5698 (2013.01); H03H 9/02338 (2013.01); H03H 9/2436 (2013.01); H03H 2009/0244 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A MEMS device comprising:
a resonator element having a frequency and comprising a transversely isotropic monocrystalline material; and
a quarter-wavelength matched phononic crystal substrate;
wherein:
the resonator element is anchored to the quarter-wavelength matched phononic crystal substrate;
the resonator element and the quarter-wavelength matched phononic crystal substrate are not coplanar;
the resonator element and the quarter-wavelength matched phononic crystal substrate are configured to preserve resonant mode symmetry to minimize frequency split between resonant modes; and
acoustic decoupling of the resonator element and the quarter-wavelength matched phononic crystal substrate is at least partially dependent upon the frequency of the resonator element.