US 12,407,078 B2
Tuner, and impedance matching method
Taro Ikeda, Nirasaki (JP); and Eiki Kamata, Nirasaki (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Appl. No. 18/026,103
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
PCT Filed Sep. 6, 2021, PCT No. PCT/JP2021/032597
§ 371(c)(1), (2) Date Mar. 13, 2023,
PCT Pub. No. WO2022/059533, PCT Pub. Date Mar. 24, 2022.
Claims priority of application No. 2020-157513 (JP), filed on Sep. 18, 2020.
Prior Publication US 2023/0335876 A1, Oct. 19, 2023
Int. Cl. H01P 3/06 (2006.01); H01J 37/32 (2006.01)
CPC H01P 3/06 (2013.01) [H01J 37/3222 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A tuner that forms a part of an electromagnetic wave transmission path for supplying electromagnetic waves from a power supply to a load, and that matches an impedance on a power supply side and an impedance on a load side, comprising:
a coaxial line including a cylindrical inner conductor and a cylindrical outer conductor disposed coaxially outside the inner conductor;
an annular first dielectric constant changing material disposed in a space between the inner conductor and the outer conductor of the coaxial line, and having a variable dielectric constant;
an annular second dielectric constant changing material spaced apart from the first dielectric constant changing material in a line length direction of the coaxial line, disposed in the space between the inner conductor and the outer conductor of the coaxial line, and having a variable dielectric constant;
a first power supply portion configured to supply power to the first dielectric constant changing material; and
a second power supply portion configured to supply power to the second dielectric constant changing material.