US 12,406,904 B2
Integrated circuit device including normal cells and through via supplying backside power to frontside power gating cell
Jungho Do, Hwaseong-si (KR); and Sanghoon Baek, Seoul (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Dec. 27, 2021, as Appl. No. 17/562,428.
Claims priority of application No. 10-2020-0185205 (KR), filed on Dec. 28, 2020.
Prior Publication US 2022/0208757 A1, Jun. 30, 2022
Int. Cl. H01L 23/48 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 23/535 (2006.01); H10D 89/10 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01); H10D 84/90 (2025.01)
CPC H01L 23/481 (2013.01) [H01L 23/5226 (2013.01); H01L 23/5286 (2013.01); H01L 23/535 (2013.01); H10D 89/10 (2025.01); H10D 84/0149 (2025.01); H10D 84/0158 (2025.01); H10D 84/0186 (2025.01); H10D 84/038 (2025.01); H10D 84/981 (2025.01)] 20 Claims
OG exemplary drawing
 
1. An integrated circuit device comprising:
a substrate comprising a first active area and a second active area spaced apart from each other in a first horizontal direction;
a plurality of normal cells arranged on a first surface of the substrate;
a power wiring structure arranged on a second surface of the substrate that is opposite to the first surface;
a power gating cell arranged on the first surface of the substrate; and
a ground line extending in a second horizontal direction on the first surface of the substrate,
wherein the power gating cell comprises:
a sleep control transistor arranged in the first active area; and
a through via penetrating the second active area of the substrate, wherein the through via extends in a vertical direction from the power wiring structure to a power line, and is provided between the ground line and a virtual power line along the first horizontal direction,
wherein the power gating cell is configured to provide a virtual power voltage to the plurality of normal cells through the virtual power line based on a power voltage supplied from the power wiring structure through the through via and the power line,
wherein the virtual power line is spaced apart from the ground line in the first horizontal direction and extends in the second horizontal direction, and
wherein the power line is spaced apart from the ground line in the first horizontal direction and extends in the second horizontal direction.