US 12,406,902 B2
Vapor chamber and manufacturing method of vapor chamber
Kengo Tanaka, Tokyo (JP)
Assigned to FURUKAWA ELECTRIC CO., LTD., Tokyo (JP)
Appl. No. 18/000,473
Filed by FURUKAWA ELECTRIC CO., LTD., Tokyo (JP)
PCT Filed Jun. 4, 2021, PCT No. PCT/JP2021/021371
§ 371(c)(1), (2) Date Dec. 1, 2022,
PCT Pub. No. WO2021/246519, PCT Pub. Date Dec. 9, 2021.
Claims priority of application No. 2020-098035 (JP), filed on Jun. 4, 2020.
Prior Publication US 2023/0215777 A1, Jul. 6, 2023
Int. Cl. H01L 23/427 (2006.01); B23P 15/26 (2006.01); H01L 21/48 (2006.01)
CPC H01L 23/427 (2013.01) [B23P 15/26 (2013.01); H01L 21/4871 (2013.01); B23P 2700/09 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A vapor chamber having a working fluid in an internal space formed between a first metal sheet and a second metal sheet, wherein:
the first metal sheet comprises a recessed channel, at least one projecting part, and at least one flow channel groove,
the recessed channel is provided at an inner surface of the first metal sheet,
the projecting part projects from the inner surface of the first metal sheet toward an inner surface of the second metal sheet, and a top face of the projecting part abuts the inner surface of the second metal sheet,
the flow channel groove has a bottom groove part, a side face groove part and a top face groove part,
the bottom groove part is provided at a bottom face of the recessed channel,
the side face groove part is provided at a side face of the projecting part, and is connected to the bottom groove part, and
the top face groove part is provided at the top face of the projecting part, and is connected to the side face groove part,
wherein,
the bottom groove part, the side face groove part and the top face groove part form a sealed space,
the top groove part is higher than the side face groove part,
for the top face groove part, first ends differing from second ends connecting with the side face groove part are connected to each other, or
for the bottom face groove part, third ends differing from fourth ends connecting with the side face groove part are connected to each other.