| CPC H01L 21/68785 (2013.01) [H01L 21/68792 (2013.01)] | 9 Claims |
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1. A susceptor comprising:
a plate having a heating element layer embedded therein; and
a hollow shaft joined to a bottom of the plate,
wherein the plate comprises a purge gas channel layer disposed on a plane different from that of the heating element layer, and
wherein the purge gas channel layer comprises an internal channel and multiple radial branch channels extending outward from the internal channel,
wherein the hollow shaft comprises a side wall extending in a longitudinal direction and a connecting portion at an end of the side wall forming a joint portion with the plate,
wherein the internal channel has a shape conforming to the connecting portion of the shaft,
wherein, on a plane projected onto the plate, the internal channel is disposed within a contour of the connecting portion,
wherein the shaft comprises a side wall channel extending in the longitudinal direction of the side wall within the side wall, and
wherein a communication hole provided at the bottom of the internal channel of the plate, and the communication hole is aligned with the internal channel and the side wall channel.
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