US 12,406,871 B2
Substrate susceptor using edge purging
Raj Singu, Phoenix, AZ (US); Todd Robert Dunn, Cave Creek, AZ (US); Carl Louis White, Gilbert, AZ (US); Herbert Terhorst, Amersfoort (NL); Eric James Shero, Phoenix, AZ (US); and Bhushan Zope, Phoenix, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP HOLDING B.V., Almere (NL)
Filed on Jul. 29, 2022, as Appl. No. 17/816,052.
Application 17/816,052 is a division of application No. 16/875,088, filed on May 15, 2020, granted, now 11,404,302.
Claims priority of provisional application 62/851,414, filed on May 22, 2019.
Prior Publication US 2022/0380895 A1, Dec. 1, 2022
Int. Cl. H01L 21/687 (2006.01); B25B 11/00 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/46 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/6838 (2013.01) [B25B 11/005 (2013.01); C23C 16/45544 (2013.01); C23C 16/4584 (2013.01); C23C 16/46 (2013.01); H01L 21/68735 (2013.01); H01L 21/68785 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method for purging a workpiece susceptor, the method comprising:
loading a workpiece onto a workpiece contact zone on a front face of a susceptor body, such that an outer edge of the workpiece is disposed radially outward from the workpiece contact zone, wherein the workpiece contact zone is substantially annular, and wherein loading the workpiece onto the workpiece contact zone comprises loading the workpiece radially inward of a workpiece retaining portion of the susceptor body positioned radially outward from the workpiece contact zone, the workpiece retaining portion configured to retain the workpiece;
positioning the workpiece in a processing configuration wherein the front face of the susceptor body is in fluid communication with a reaction chamber and wherein a back face of the susceptor body is in fluid communication with a loading chamber;
providing a first pressure within the reaction chamber; and
purging a backside of the outer edge of the workpiece by flowing purge gas at a second pressure from one or more channels within the susceptor body, to a gap radially outward of the workpiece contact zone and axially between the front face of the susceptor plate and the workpiece, to the reaction chamber, wherein the second pressure is greater than the first pressure.