US 12,406,870 B2
Deposition mask stage, display manufacturing apparatus including the same, and display manufacturing method using the same
Euigyu Kim, Suwon-si (KR); Sang Min Yi, Seoul (KR); Junhyeuk Ko, Yongin-si (KR); Jongbum Kim, Yongin-si (KR); Jaesuk Moon, Seongnam-si (KR); Hong-Kyun Ahn, Hwaseong-si (KR); and Kyunghoon Chung, Seongnam-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Feb. 1, 2023, as Appl. No. 18/104,453.
Claims priority of application No. 10-2022-0039122 (KR), filed on Mar. 29, 2022.
Prior Publication US 2023/0317492 A1, Oct. 5, 2023
Int. Cl. H01T 23/00 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/6833 (2013.01) 20 Claims
OG exemplary drawing
 
1. A deposition mask stage, comprising:
a stage frame;
chucks combined with the stage frame; and
support blocks on a back side of the stage frame, wherein
the chucks are spaced apart from each other in a first direction and a second direction that are defined in an extending direction of the stage frame, the first and second directions intersecting each other, and
the support blocks are spaced apart from each other in the first direction and the second direction on the back side of the stage frame.