US 12,406,864 B2
Susceptor
Hyung-Jun Cho, Anseong-si (KR)
Assigned to MiCo Ceramics Ltd., Anseong-si (KR)
Filed by MiCo Ceramics Ltd., Anseong-si (KR)
Filed on Oct. 29, 2024, as Appl. No. 18/929,747.
Claims priority of application No. 10-2023-0146632 (KR), filed on Oct. 30, 2023.
Prior Publication US 2025/0140582 A1, May 1, 2025
Int. Cl. H01L 21/67 (2006.01); H05B 3/14 (2006.01); H05B 3/18 (2006.01)
CPC H01L 21/67098 (2013.01) [H05B 3/143 (2013.01); H05B 3/18 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A susceptor comprising an insulating plate having a plurality of heater layers arranged thereon,
wherein the plurality of heater layers comprises: a first heater layer having a first pattern comprising a first resistance part and a first connection part connected between a first terminal pair; and a second heater layer having a second pattern comprising a second resistance part and a second connection part connected between a second terminal pair,
wherein one end of the first resistance part is connected to a first terminal of the first terminal pair, and the first connection part is configured to connect the other end of the first resistance part and a second terminal of the first terminal pair, and the other end of the first resistance part is an end of the first resistance part that is positioned diametrically further outward from a center of the insulating plate than the one end of the first resistance part,
one end of the second resistance part is connected to a first terminal of the second terminal pair, and the second connection part is configured to connect the other end of the second resistance part and a second terminal of the second terminal pair, the other end of the second resistance part is an end of the second resistance part that is positioned diametrically further outward from the center of the insulating plate than the one end of the second resistance part, and
wherein the first connection part and the second connection part extend in a diametric direction with respect to the center of the insulating plate, and each of the first connection part and the second connection part is arranged one by one between adjacent resistance part patterns.