US 12,406,838 B2
Rate enhanced pulsed DC sputtering system
Douglas Pelleymounter, Grand Rapids, MN (US)
Assigned to Advanced Energy Industries, Inc., Fort Collins, CO (US)
Filed by Advanced Energy Industries, Inc., Fort Collins, CO (US)
Filed on Dec. 15, 2020, as Appl. No. 17/122,493.
Application 17/122,493 is a continuation of application No. 15/802,791, filed on Nov. 3, 2017, granted, now 10,910,203.
Application 15/802,791 is a continuation of application No. 14/697,267, filed on Apr. 27, 2015, granted, now 9,812,305, issued on Nov. 7, 2017.
Prior Publication US 2021/0111010 A1, Apr. 15, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01)
CPC H01J 37/3476 (2013.01) [C23C 14/3485 (2013.01); C23C 14/35 (2013.01); H01J 37/3405 (2013.01); H01J 37/3438 (2013.01); H01J 37/3444 (2013.01); H01J 37/3467 (2013.01); H01J 2237/2485 (2013.01); H01J 2237/327 (2013.01); H01J 2237/332 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A pulsed power system, comprising:
a first power lead, a second power lead, and a third power lead;
a first power source coupled to the first power lead and the second power lead, the first power source configured to provide a first voltage to the first power lead that alternates between positive and negative relative to the second power lead during each of multiple cycles;
a second power source coupled to the second power lead and the third power lead, the second power source configured to provide a second voltage to the third power lead that alternates between positive and negative relative to the second power lead during each of the multiple cycles; and
a controller programmed to control the first power source and the second power source to phase-synchronize the first voltage with the second voltage, so both, the first voltage and the second voltage simultaneously cross zero volts.