US 12,406,837 B2
Reaction cell for species sensing
Abdullah Zafar, Santa Clara, CA (US); Kelvin Chan, San Ramon, CA (US); and Philip Allan Kraus, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 15, 2022, as Appl. No. 17/841,557.
Prior Publication US 2023/0411130 A1, Dec. 21, 2023
Int. Cl. G01N 21/35 (2014.01); H01J 37/32 (2006.01); G01N 21/27 (2006.01)
CPC H01J 37/3299 (2013.01) [G01N 21/35 (2013.01); H01J 37/32357 (2013.01); G01N 21/27 (2013.01); G01N 2201/06113 (2013.01); H01J 2237/24585 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A semiconductor processing tool, comprising:
a plasma source;
a chamber coupled to the plasma source;
a pump coupled to the chamber; and
a sampling line, wherein the sampling line comprises:
a reaction chamber; and
an absorption chamber.