US 12,406,836 B2
Device and method for plasma generation in a wide pressure range and system and method for optical gas analysis/detection by means of such a device
Astrid Waldner, Bad Ragaz (CH); Bernhard Andreaus, Rapperswil (CH); Urs Wälchli, Chur (CH); and Stefan Kaiser, Ruggell (LI)
Assigned to INFICON AG, Balzers (LI)
Appl. No. 18/285,042
Filed by INFICON AG, Balzers (LI)
PCT Filed Mar. 21, 2022, PCT No. PCT/EP2022/057384
§ 371(c)(1), (2) Date Sep. 29, 2023,
PCT Pub. No. WO2022/207396, PCT Pub. Date Oct. 6, 2022.
Claims priority of application No. 00342/21 (CH), filed on Mar. 31, 2021.
Prior Publication US 2024/0177979 A1, May 30, 2024
Int. Cl. H01J 37/32 (2006.01); H01J 37/34 (2006.01)
CPC H01J 37/32981 (2013.01) [H01J 37/32018 (2013.01); H01J 37/32211 (2013.01); H01J 37/3244 (2013.01); H01J 37/32825 (2013.01); H01J 37/32972 (2013.01); H01J 37/3447 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device for plasma generation in a wide pressure range comprising:
a first plasma source, wherein the first plasma source is arranged in a first discharge chamber and is adapted to generate a first plasma in a low-pressure range;
a second plasma source, wherein the second plasma source is arranged in a second discharge chamber and is adapted to generate a second plasma in a high-pressure range;
a first coupling element for coupling the device to a system, wherein the coupling element is designed to lead gas out of the system;
a second coupling element for coupling the device to an optical sensor,
wherein the first discharge chamber has a first optical connection having at least one optical lens to the second coupling element, and the second discharge chamber has a second optical connection having at least one optical lens to the second coupling element.