US 12,406,827 B2
Microscopic specimen and analysis method thereof using microscope
Hyobin Yoo, Seoul (KR)
Assigned to Sogang University Research & Business Development Foundation, Seoul (KR)
Filed by Sogang University Research & Business Development Foundation, Seoul (KR)
Filed on Mar. 16, 2023, as Appl. No. 18/184,761.
Claims priority of application No. 10-2022-0036294 (KR), filed on Mar. 23, 2022; and application No. 10-2022-0107068 (KR), filed on Aug. 25, 2022.
Prior Publication US 2023/0307208 A1, Sep. 28, 2023
Int. Cl. H01J 37/28 (2006.01); H01J 37/20 (2006.01); H01J 37/244 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 37/20 (2013.01); H01J 37/244 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A microscopic specimen comprising:
a lower plate including a lower opening portion;
an upper plate configured to cover the lower opening portion;
a target material layer on the upper plate;
a lower electrode layer between the upper plate and the target material layer;
an upper electrode layer on the target material layer; and
a wiring pattern electrically connected to each of the upper electrode layer and the lower electrode layer.