| CPC H01J 37/28 (2013.01) [H01J 37/20 (2013.01); H01J 37/244 (2013.01)] | 20 Claims | 

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               1. A microscopic specimen comprising: 
            a lower plate including a lower opening portion; 
                an upper plate configured to cover the lower opening portion; 
                a target material layer on the upper plate; 
                a lower electrode layer between the upper plate and the target material layer; 
                an upper electrode layer on the target material layer; and 
                a wiring pattern electrically connected to each of the upper electrode layer and the lower electrode layer. 
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