US 12,406,826 B2
Charged particle beam device and sample observation method
Daisuke Bizen, Tokyo (JP); Natsuki Tsuno, Tokyo (JP); Yasuhiro Shirasaki, Tokyo (JP); Yohei Nakamura, Tokyo (JP); and Satoshi Takada, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Appl. No. 18/015,605
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Sep. 18, 2020, PCT No. PCT/JP2020/035486
§ 371(c)(1), (2) Date Jan. 11, 2023,
PCT Pub. No. WO2022/059171, PCT Pub. Date Mar. 24, 2022.
Prior Publication US 2023/0253180 A1, Aug. 10, 2023
Int. Cl. H01J 37/28 (2006.01); H01J 37/20 (2006.01); H01J 37/244 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 37/20 (2013.01); H01J 37/244 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A charged particle beam device comprising:
a charged particle optical system including a deflector, the charged particle optical system being configured to scan a sample with a pulsed charged particle beam by the deflector;
a light source configured to irradiate the sample with pulsed light;
a detector configured to detect secondary charged particles generated by irradiation on the sample with the charged particle beam;
an image formation unit configured to form a scan image based on a signal from the detector; and
a control unit configured to control the light source, the charged particle optical system, and the detector such that a deflection signal for deflecting the charged particle beam in a first direction, a first timing for irradiating the sample with the pulsed light, a second timing for irradiating the sample with the charged particle beam, and a third timing for detecting the secondary charged particles by the detector are synchronized, wherein
when a deflection amount of the charged particle beam in the first direction in a time period of the first timing corresponds to coordinates of n pixels in the scan image, the control unit scans a same line m times (m<n) while shifting the first timing with respect to the deflection signal such that a location irradiated with the charged particle beam by each scanning in the first direction has different pixel coordinates, and
the image formation unit restores a pixel value at pixel coordinates at which a signal is defective based on an integration scan image in which m scan images obtained by m times of scanning are integrated.