US 12,406,720 B2
Memory structure, manufacturing method thereof, and operating method thereof
Feng-Min Lee, Hsinchu (TW); Po-Hao Tseng, Taichung (TW); Yu-Yu Lin, New Taipei (TW); Yu-Hsuan Lin, Taichung (TW); Wei-Fu Wang, Keelung (TW); and Wei-Lun Weng, Tainan (TW)
Assigned to MACRONIX INTERNATIONAL CO., LTD., Hsinchu (TW)
Filed by MACRONIX INTERNATIONAL CO., LTD., Hsinchu (TW)
Filed on Dec. 21, 2023, as Appl. No. 18/391,880.
Prior Publication US 2025/0210100 A1, Jun. 26, 2025
Int. Cl. G11C 11/4096 (2006.01); G11C 11/4094 (2006.01); H10B 12/00 (2023.01)
CPC G11C 11/4096 (2013.01) [G11C 11/4094 (2013.01); H10B 12/05 (2023.02); H10B 12/482 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A memory structure, comprising:
a plurality of insulating layers and a plurality of gate layers that are alternately stacked;
a first doping layer penetrating through the insulating layers and the gate layers;
a plurality of channel layers respectively connected to the first doping layer, wherein the channel layers and the insulating layers are alternately stacked;
a columnar channel penetrating through the insulating layers and the gate layers;
a plurality of second doping layers respectively surrounding the columnar channel, wherein the second doping layers are respectively connected to the channel layers;
a third doping layer coupled to the columnar channel;
a fourth doping layer coupled to the columnar channel;
a first dielectric layer disposed between the first doping layer and the gate layers;
a plurality of second dielectric layers respectively disposed between the second doping layers and the gate layers;
a third dielectric layer disposed between the columnar channel and the second doping layers; and
a plurality of fourth dielectric layers respectively disposed between the channel layers and the gate layers.