US 12,406,350 B2
Estimation model creation device, estimation model creation method, and storage medium
Toyohisa Tsuruda, Koshi (JP); and Masato Hosaka, Koshi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Jun. 17, 2024, as Appl. No. 18/744,953.
Application 18/744,953 is a continuation of application No. 17/645,127, filed on Dec. 20, 2021, granted, now 12,051,189.
Claims priority of application No. 2020-215306 (JP), filed on Dec. 24, 2020.
Prior Publication US 2024/0338809 A1, Oct. 10, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G06K 9/00 (2022.01); G06T 7/00 (2017.01); G06T 7/50 (2017.01); G06T 7/90 (2017.01)
CPC G06T 7/0004 (2013.01) [G06T 7/50 (2017.01); G06T 7/90 (2017.01)] 17 Claims
OG exemplary drawing
 
1. An estimation device, comprising:
a first memory that stores a color-change estimation model created based on first information on a color of a surface of a substrate included in a post-processing image, which is first image information on the surface of the substrate subjected to film processing, and based on second information on the color of the surface of the substrate included in a pre-processing image, which is second image information on the surface of the substrate not subjected to the film processing; and
a color estimation circuit configured to estimate the first information on the color of the surface of the substrate included in the post-processing image based on the color-change estimation model and the second information on the color of the surface of the substrate included in the pre-processing image.