US 12,405,601 B2
Display method and control device
Ryota Aoi, Sapporo (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Feb. 23, 2022, as Appl. No. 17/678,477.
Claims priority of application No. 2021-033651 (JP), filed on Mar. 3, 2021.
Prior Publication US 2022/0283572 A1, Sep. 8, 2022
Int. Cl. G05B 19/41 (2006.01); C23C 16/52 (2006.01); G05B 19/418 (2006.01); G06F 3/04847 (2022.01); H01J 37/32 (2006.01); H01L 21/677 (2006.01)
CPC G05B 19/41865 (2013.01) [C23C 16/52 (2013.01); G06F 3/04847 (2013.01); H01J 37/32935 (2013.01); G05B 2219/34379 (2013.01); H01L 21/67739 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A control method of a substrate processing apparatus, the method comprising:
storing, in a memory, first history information indicating that a processing is executed by the substrate processing apparatus based on a process recipe;
storing, in the memory, second history information indicating that an execution instruction for a job of the substrate processing apparatus is received to instruct execution of the processing;
storing, in the memory, third history information indicating that an execution instruction for a control job of the substrate processing apparatus is received to instruct collective execution of a plurality of jobs of the substrate processing apparatus;
calculating, based on the first, second and third history information, a first idle time from an end of the processing to a start of a subsequent processing, a second idle time from an end of the job to a start of a subsequent job, and a third idle time from an end of the control job to a start of a subsequent control job;
selecting at least one of the first, second and third idle times;
determining whether the selected at least one of the first, second and third idle times for each processing exceeds a threshold value; and
when determined that the selected at least one of the first, second and third idle times for each processing exceeds the threshold value, stopping the substrate processing apparatus and notifying an operator that a trouble has occurred in the substrate processing apparatus.